Masahiko Kitayama
Manager at Kuraray Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Oscillators, Quartz, Chemical species, Polymers, Spectroscopy, Crystals, Oxygen, Polymerization, Chemical analysis

Proceedings Article | 6 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Statistical analysis, Data modeling, Modulation, Quartz, Polymers, Crystals, Interfaces, Solids, Liquids, Protactinium

Proceedings Article | 22 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Polymers, Molecules, Coating, Atomic force microscopy, Polymerization, Atomic force microscope, Line edge roughness, Polymer thin films, Chemically amplified resists

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Thin films, Lithography, Oscillators, Quartz, Polymers, Crystals, Line edge roughness, Photoresist processing, Polymer thin films, Absorption

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