Dr. Masahiro Hatakeyama
at EBARA Corp
SPIE Involvement:
Author
Publications (23)

SPIE Journal Paper | 24 June 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Defect detection, Inspection, Photomasks, Signal detection, Extreme ultraviolet lithography, Detection and tracking algorithms, Image processing, Optimization (mathematics), Extreme ultraviolet, Electron microscopes

Proceedings Article | 10 May 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Defect detection, Imaging systems, Sensors, Image processing, Inspection, Electron microscopes, Image sensors, Photomasks, Extreme ultraviolet lithography, Defect inspection

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Defect detection, Detection and tracking algorithms, Image processing, Inspection, Electron microscopes, Optical inspection, Image sensors, Data processing, Photomasks, Extreme ultraviolet, Image enhancement, Extreme ultraviolet lithography, Signal detection

SPIE Journal Paper | 8 March 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Inspection, Photomasks, Defect detection, Image sensors, Extreme ultraviolet lithography, Signal detection, Sensors, Defect inspection, Image processing, Image resolution

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Defect detection, Detection and tracking algorithms, Image processing, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Algorithm development, Optimization (mathematics), Signal detection

SPIE Journal Paper | 21 September 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Defect detection, Signal detection, Photomasks, Extreme ultraviolet lithography, Inspection, Target detection, Extreme ultraviolet, Image processing, Image enhancement, Signal processing

Showing 5 of 23 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top