Masahiro Shoji
Sales Representative at Nippon Control System Corp
SPIE Involvement:
Publications (21)

Proceedings Article | 25 September 2010 Paper
Masaki Yamabe, Tadao Inoue, Masahiro Shoji, Akio Yamada, Hiromichi Hoshi, Kenichi Takahara
Proceedings Volume 7823, 78230S (2010)
KEYWORDS: Photomasks, Inspection, Logic, Manufacturing, Vestigial sideband modulation, Image transmission, System integration, Extreme ultraviolet, Diagnostics, Parallel processing

Proceedings Article | 25 September 2010 Paper
Dai Tsunoda, Masahiro Shoji, Hiroyuki Tsunoe
Proceedings Volume 7823, 78233D (2010)
KEYWORDS: Scattering, Laser scattering, Photomasks, Chemical species, Lithography, Molecules, Convolution, Modulation, Parallel processing, Critical dimension metrology

Proceedings Article | 25 May 2010 Paper
Proceedings Volume 7748, 77480Y (2010)
KEYWORDS: Vestigial sideband modulation, Software development, Data conversion, Optical proximity correction, Photomasks, Mask making, Analytical research, Inspection, Logic, Scanning electron microscopy

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 764112 (2010)
KEYWORDS: Vestigial sideband modulation, Data conversion, Software development, Optical proximity correction, Photomasks, Inspection, Analytical research, Electronics, Manufacturing, Data processing

Proceedings Article | 2 April 2010 Paper
Proceedings Volume 7638, 76383B (2010)
KEYWORDS: Electron beam lithography, Scattering, Laser scattering, Electron beams, Calibration, Semiconducting wafers, Analytical research, Photoresist processing, Hydrogen, Critical dimension metrology

Showing 5 of 21 publications
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