Masahiro Yamamoto
President and Chief Executive Officer at TASMIT Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Data analysis, Etching, Optical lithography, Double patterning technology, Imaging systems, Error analysis, Distortion

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Computer aided design, Manufacturing, Inspection, Scanning electron microscopy, Image processing, Data processing, Metals

Proceedings Article | 18 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Photomasks, Inspection, Wafer inspection, Semiconducting wafers, Metals, Extreme ultraviolet, Extreme ultraviolet lithography, Metrology, Defect inspection, Lithography

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Overlay metrology, Semiconducting wafers, Inspection, Process control, Metrology, Semiconductors, Etching, Array processing, Control systems, Line edge roughness

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Optical proximity correction, Semiconducting wafers, Image classification, Transistors, Manufacturing, Tolerancing, Optical lithography, Inspection, OLE for process control, Semiconductors

Showing 5 of 18 publications
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