Dr. Masahito Niibe
Associate Professor/Researcher at Univ of Hyogo
SPIE Involvement:
Author
Publications (34)

PROCEEDINGS ARTICLE | May 18, 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Carbon, Mirrors, Multilayers, Contamination, Reflectivity, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Carbon, Mirrors, Multilayers, Chemical species, Coating, Bioalcohols, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Carbon, Mirrors, Reflectivity, Bioalcohols, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Mirrors, Interferometers, Wavefronts, Optical testing, Projection systems, Extreme ultraviolet, Optics manufacturing, EUV optics, Wavefront metrology, Diffusion tensor imaging

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Carbon, Mirrors, Reflectivity, Bioalcohols, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Carbon, Lithography, Mirrors, Gases, Reflectivity, Adsorption, Extreme ultraviolet, Extreme ultraviolet lithography, Natural surfaces, Protactinium

Showing 5 of 34 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top