Dr. Endo Masakazu
Assistant Manager at Hitachi High-Tech Science Corp
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 3 April 2010
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Semiconductors, Manufacturing, Inspection, Design for manufacturing, Photomasks, Optical proximity correction, Analog electronics, Electronic design automation, Defect inspection, Design for manufacturability

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Metals, Manufacturing, Inspection, Data processing, Design for manufacturing, Photomasks, Optical proximity correction, Data conversion, Electronic design automation, Defect inspection

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Semiconductors, Manufacturing, Inspection, Data processing, Design for manufacturing, Photomasks, Data conversion, Analog electronics, Electronic design automation, Design for manufacturability

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Semiconductors, Reticles, Manufacturing, Inspection, Data processing, Design for manufacturing, Photomasks, Data conversion, Semiconducting wafers, Design for manufacturability

Proceedings Article | 19 May 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Nanotechnology, Data modeling, Error analysis, Parallel processing, Data processing, Photomasks, Explosives, Optical proximity correction, Data conversion, Standards development

Showing 5 of 11 publications
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