Masakazu Hattori
at Kyushu Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 March 2016
Proc. SPIE. 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
KEYWORDS: Carbon, Lithography, Optical lithography, Graphene, Silicon, Laser processing, Atomic force microscopy, Transmission electron microscopy, Raman spectroscopy, Laser irradiation, Excimer lasers, Silicon carbide, Signal detection, Pulsed laser operation

Proceedings Article | 12 March 2015
Proc. SPIE. 9351, Laser-based Micro- and Nanoprocessing IX
KEYWORDS: Carbon, Graphene, Chemical species, Silicon, Atomic force microscopy, Transmission electron microscopy, Raman spectroscopy, Laser irradiation, Silicon carbide, Protactinium

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