Masakazu Kato
General Manager at Nissan Chemical Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Sensors, Etching, Silicon, Reflectivity, Chromophores, Photoresist materials, Photomasks, Plasma etching, System on a chip

Proceedings Article | 12 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Polymers, Reflectivity, Scanning electron microscopy, Chromophores, Double patterning technology, Immersion lithography, Critical dimension metrology, Thin film coatings, Photoresist processing

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Silicon, Coating, Control systems, Scanning electron microscopy, Photomicroscopy, Photoresist processing, Semiconducting wafers, Bottom antireflective coatings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top