Mr. Masaki Chikahisa
at Osaka Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 1, 2004
Proc. SPIE. 5607, Wavelet Applications in Industrial Processing II
KEYWORDS: Signal to noise ratio, Lithography, Edge detection, Wavelet transforms, Wavelets, Denoising, Interference (communication), Scanning electron microscopy, Photoresist materials, Line edge roughness

PROCEEDINGS ARTICLE | May 22, 2003
Proc. SPIE. 5011, Machine Vision Applications in Industrial Inspection XI
KEYWORDS: Electron beams, Wavelet transforms, Defect detection, Imaging systems, Wavelets, Inspection, Scanning electron microscopy, Monte Carlo methods, Optical simulations, Beam analyzers

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