Masaki Chikahisa
at Osaka Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 1, 2004
Proc. SPIE. 5607, Wavelet Applications in Industrial Processing II
KEYWORDS: Wavelets, Line edge roughness, Signal to noise ratio, Photoresist materials, Scanning electron microscopy, Edge detection, Lithography, Wavelet transforms, Denoising, Interference (communication)

PROCEEDINGS ARTICLE | May 22, 2003
Proc. SPIE. 5011, Machine Vision Applications in Industrial Inspection XI
KEYWORDS: Wavelets, Electron beams, Scanning electron microscopy, Beam analyzers, Monte Carlo methods, Inspection, Optical simulations, Wavelet transforms, Defect detection, Imaging systems

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