Masaki Nakano
Researcher at EUVA
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Ions, Laser development, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering, Tin

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Light sources, Chemical species, Electrodes, Laser development, Laser irradiation, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Mirrors, Light sources, Carbon dioxide, Ions, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

Proceedings Article | 13 September 2007
Proc. SPIE. 6703, Ultrafast X-Ray Sources and Detectors
KEYWORDS: Light sources, Ions, Carbon dioxide lasers, Magnetism, Gas lasers, Extreme ultraviolet, Carbon monoxide, Pulsed laser operation, Plasma, Tin

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Glasses, Ions, Nd:YAG lasers, Solids, Gas lasers, Extreme ultraviolet, Carbon monoxide, Plasma, Tin

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top