Dr. Masaki Yoshioka
at Ushio Opto Semiconductors Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (15)

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Electrodes, Reliability, Inspection, Laser stabilization, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

SPIE Journal Paper | May 29, 2012
JM3 Vol. 11 Issue 02
KEYWORDS: Tin, Plasma, Extreme ultraviolet, Gas lasers, Extreme ultraviolet lithography, Photons, Mirrors, Light sources, Pulsed laser operation, Carbon monoxide

PROCEEDINGS ARTICLE | April 7, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Semiconductors, Light sources, Scanners, Laser applications, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers, Plasma, Tin

PROCEEDINGS ARTICLE | March 20, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Lithography, Electrodes, Scanners, Ultraviolet radiation, Reliability, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Plasma, Tin

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Curtains, Electrodes, Scanners, Reliability, Xenon, Extreme ultraviolet, Integrated optics, Extreme ultraviolet lithography, Plasma, Tin

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Energy efficiency, Capacitors, Electrodes, Scanners, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Prototyping, Plasma, Tin

Showing 5 of 15 publications
Conference Committee Involvement (4)
Extreme Ultraviolet (EUV) Lithography VI
23 February 2015 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography V
24 February 2014 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography IV
25 February 2013 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography III
13 February 2012 | San Jose, California, United States
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