Masamitsu Itoh
at Kioxia Holdings Corp
SPIE Involvement:
Publications (53)

Proceedings Article | 16 October 2017 Paper
Proceedings Volume 10451, 104510K (2017)
KEYWORDS: Extreme ultraviolet, Inspection, Photomasks, Nanoimprint lithography, Deep ultraviolet, Scanning electron microscopy, Signal to noise ratio, Target detection, Defect detection, Semiconducting wafers

Proceedings Article | 13 July 2017 Paper
Proceedings Volume 10454, 104540Q (2017)
KEYWORDS: Nanoimprint lithography, Lithography, Critical dimension metrology, Etching, Scanning electron microscopy, Electron beam lithography, Semiconducting wafers, Electron beams, Optical lithography, Semiconductors

Proceedings Article | 5 October 2016 Paper
Proceedings Volume 9985, 99852E (2016)
KEYWORDS: Lithography, Nanoimprint lithography, Image quality, Etching, Photoresist processing, Optical lithography, Defect inspection, X-rays, Double patterning technology, Semiconducting wafers

Proceedings Article | 18 May 2016 Paper
Eiji Yamanaka, Rikiya Taniguchi, Masamitsu Itoh, Kazuhiko Omote, Yoshiyasu Ito, Kiyoshi Ogata, Naoya Hayashi
Proceedings Volume 9984, 99840V (2016)
KEYWORDS: Diffraction, Nanoimprint lithography, Quartz, X-rays, Transmission electron microscopy, Scattering, Semiconducting wafers, Lithography, Nondestructive evaluation, Nanostructures

Proceedings Article | 10 May 2016 Paper
Proceedings Volume 9984, 99840T (2016)
KEYWORDS: Nanoimprint lithography, Optical lithography, Lithography, Dry etching, Image processing, Photoresist processing, Etching, Scanning electron microscopy, Semiconducting wafers, Vestigial sideband modulation

Showing 5 of 53 publications
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