Masanori Takahashi
at Toshiba Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Diffraction, Finite-difference time-domain method, Computer simulations, Wave propagation, Finite element methods, Photomasks, Electromagnetism, Radio propagation, Maxwell's equations

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Lithography, Diffraction, Finite-difference time-domain method, Wavefronts, Computer simulations, Wave propagation, Photomasks, Electromagnetism, Phase velocity, Radio propagation

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Reflection, Fourier transforms, Computer simulations, 3D modeling, Optical proximity correction, Convolution, Critical dimension metrology, Photoresist processing, 3D image processing

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