Dr. Masanori Yamaguchi
at Ushio Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 8 March 2014
Proc. SPIE. 8986, Gallium Nitride Materials and Devices IX
KEYWORDS: Quantum wells, Ultraviolet radiation, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Gallium nitride, Sapphire, Aluminum, Aluminum nitride, Indium gallium nitride

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Optical microscopes, Polymethylmethacrylate, Etching, Quartz, Ultraviolet radiation, Nickel, Oxygen, Scanning electron microscopy, Vacuum ultraviolet

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Metrology, Etching, Ultraviolet radiation, Scanning electron microscopy, Photoresist materials, Finite element methods, Double patterning technology, Photoresist processing, Photoresist developing

SPIE Journal Paper | 1 January 2009
JM3 Vol. 8 Issue 01
KEYWORDS: Double patterning technology, Photoresist materials, Finite element methods, Photoresist processing, Scanning electron microscopy, Etching, Lithography, Optical lithography, Ultraviolet radiation, Image analysis

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