Dr. Masaru Tanabe Profile

Dr. Masaru Tanabe

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 May 2007 Paper

Masaru Tanabe, Toshiharu Kikuchi, Masahiro Hashimoto, Yasushi Ohkubo

Proceedings Volume 6607, 66072H (2007) https://doi.org/10.1117/12.729000

KEYWORDS: Inspection, Transmittance, Semiconducting wafers, Photomasks, Glasses, Printing, Reflection, Defect detection, Luminescence, Quartz

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Keywords/Phrases