Mr. Masashi Kanaoka Profile

Masashi Kanaoka

at Dainippon Screen Manufacturing Co Ltd

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Author

Publications (3)

Proceedings Article | 1 April 2009 Paper

CD and defect improvement challenges for immersion processes

Keisuke Ehara, Tatsuhiko Ema, Toshinari Yamasaki, Seiji Nakagawa, Seiji Ishitani, Akihiko Morita, Jeonghun Kim, Masashi Kanaoka, Shuichi Yasuda, Masaya Asai

Proceedings Volume 7273, 727322 (2009) https://doi.org/10.1117/12.814234

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Particles, Etching, Scanners, Scanning electron microscopy, Temperature metrology, Lithography, Silicon, Inspection

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Proceedings Article | 1 April 2008 Paper

Demonstration of production readiness of an immersion lithography cell

Alberto Beccalli, Paolo Canestrari, Mark Goeke, Masashi Kanaoka, Helmut Kandraschow, Takuya Kuroda, Danilo De Simone, Paolo Piacentini, Miriam Padovani, Paolo Piazza, Alessandro Rossi

Proceedings Volume 6924, 69244X (2008) https://doi.org/10.1117/12.779150

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Immersion lithography, Lithography, Scanners, Silicon, Photoresist materials, Coating, Prototyping, Liquids

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Proceedings Article | 24 March 2008 Paper

Film stacking architecture for immersion lithography process

Tomohiro Goto, Masakazu Sanada, Tadashi Miyagi, Kazuhito Shigemori, Masashi Kanaoka, Shuichi Yasuda, Osamu Tamada, Masaya Asai

Proceedings Volume 6922, 69222X (2008) https://doi.org/10.1117/12.772411

KEYWORDS: Semiconducting wafers, Particles, Lithography, Coating, Diffractive optical elements, Immersion lithography, Thin film coatings, Inspection, Silicon, Scanning electron microscopy

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