Masataka Shiratsuchi
at Toshiba Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 November 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Microscopes, Diffraction, Prisms, Phase shifting, Polarization, Inspection, Image quality, Photomasks, Digital image correlation, Phase shifts

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Diffraction, Optical design, Phase shifting, Glasses, Inspection, Chromium, Optical inspection, Photomasks, Resolution enhancement technologies, Phase shifts

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