Masato Moriya
Chief Engineering Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Actuators, Diffraction, Prisms, Light sources, Oscillators, Wavefronts, Control systems, Excimer lasers, Beam expanders, Diffraction gratings

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Infrared sensors, Lithography, Light sources, Metrology, Polarization, Sensors, Data acquisition, Semiconducting wafers, Beam propagation method, Liquid crystal lasers

Proceedings Article | 23 March 2012 Paper
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Light sources, Oscillators, High power lasers, Carbon dioxide lasers, Amplifiers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering

Proceedings Article | 8 April 2011 Paper
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Thermography, Mirrors, Light sources, Carbon dioxide lasers, Distortion, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering

Proceedings Article | 7 April 2011 Paper
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Mirrors, Light sources, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma systems, Plasma, Laser systems engineering, Tin

Showing 5 of 15 publications
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