Masaya Asai
General Manager at SCREEN Semiconductor Solutions Co Ltd
SPIE Involvement:
Publications (37)

Proceedings Article | 1 May 2023 Presentation + Paper
Kazuyo Morita, Yasuaki Tanaka, Yuji Tanaka, Masaya Asai
Proceedings Volume 12498, 1249815 (2023)
KEYWORDS: Biomass, Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Photoresist processing, Metals, Scanning electron microscopy, Materials properties, Image processing, Fabrication

Proceedings Article | 30 April 2023 Poster
Proceedings Volume 12498, 1249823 (2023)
KEYWORDS: Extreme ultraviolet lithography, Lithography, Line width roughness, Ecosystems

Proceedings Article | 31 October 2022 Poster
Proceedings Volume PC12292, PC122920W (2022)
KEYWORDS: Extreme ultraviolet, Lithography, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, Optical lithography, Ecosystems

Proceedings Article | 16 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090W (2021)
KEYWORDS: Extreme ultraviolet lithography, Scanning electron microscopy, Photoresist processing, Extreme ultraviolet, Optical lithography, Medium wave, Line width roughness, Line edge roughness, Semiconductors, Lithography

Proceedings Article | 22 February 2021 Presentation + Paper
Kazuyo Morita, Yasuaki Tanaka, Kimiko Yamamoto, Hiroki Tanaka, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori, Tomohiro Motono, Harold Stokes, Andreia Figueiredo dos Santos, Masaya Asai
Proceedings Volume 11612, 1161207 (2021)
KEYWORDS: Extreme ultraviolet lithography, Semiconducting wafers, Extreme ultraviolet, Lithography, Stochastic processes, Silicon, Polymers, Photoresist processing

Showing 5 of 37 publications
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