Prof. Masayoshi Esashi
at Tohoku Univ
SPIE Involvement:
Conference Program Committee | Conference Chair | Author | Editor
Publications (30)

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Monochromatic aberrations, Optical design, Aberration correction, Electron beams, Electrodes, Silicon, Distortion, Lens design, Objectives, Finite element methods, Optical simulations, Geometrical optics, Prototyping

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Microelectromechanical systems, Optical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Objectives, Finite element methods, Optical simulations, Semiconducting wafers, Prototyping, Nanolithography

SPIE Journal Paper | September 11, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Silicon, Electrodes, Thin film deposition, Thin films, Lithography, Germanium, Metals, Printing, Semiconducting wafers, Copper

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Semiconductors, Thin films, Lithography, Electrodes, Metals, Germanium, Ions, Silicon, Parallel processing, Thin film deposition

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Microelectromechanical systems, Lithography, Monochromatic aberrations, Electron beams, Electrodes, Copper, Silicon, Scanning electron microscopy, Objectives, Semiconducting wafers

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Microelectromechanical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Semiconducting wafers, Binary data, Prototyping, Nanowires

Showing 5 of 30 publications
Conference Committee Involvement (10)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
ICO20: MEMS, MOEMS, and NEMS
21 August 2005 | Changchun, China
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Showing 5 of 10 published special sections
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