Prof. Masayoshi Esashi
at Tohoku University
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 27 June 2019 Paper
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Optical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Optical fabrication, Photomasks, Display drivers, Prototyping

Proceedings Article | 21 March 2017 Presentation + Paper
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Monochromatic aberrations, Optical design, Aberration correction, Electron beams, Electrodes, Silicon, Distortion, Lens design, Objectives, Finite element methods, Optical simulations, Geometrical optics, Prototyping

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Microelectromechanical systems, Optical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Objectives, Finite element methods, Optical simulations, Semiconducting wafers, Prototyping, Nanolithography

SPIE Journal Paper | 11 September 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Silicon, Electrodes, Thin film deposition, Thin films, Lithography, Germanium, Metals, Printing, Semiconducting wafers, Copper

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Semiconductors, Thin films, Lithography, Electrodes, Metals, Germanium, Ions, Silicon, Parallel processing, Thin film deposition

Showing 5 of 30 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 18 January 2006

Conference Committee Involvement (10)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
ICO20: MEMS, MOEMS, and NEMS
21 August 2005 | Changchun, China
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Showing 5 of 10 Conference Committees
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