Masayoshi Ishikawa
at Hitachi Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Surgery, Image segmentation, Image processing, Pattern recognition, Feature extraction, Scanning electron microscopy, Shape analysis, Statistical modeling

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Metrology, Image processing, Inspection, Computer simulations, 3D modeling, Image analysis, Scanning electron microscopy, Image quality, Device simulation

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