Masayoshi Shiozaki
at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Thin films, Sputter deposition, Crystals, Silicon, Resistance, Bismuth, Thermoelectric materials, Selenium, Antimony, Tellurium

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