Prof. Masayuki Okoshi
Professor at National Defense Academy
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | February 22, 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Silica, Glasses, Silicon, Laser applications, Resistance, Semiconductor lasers, Laser irradiation, Profilometers, Thin film coatings, Pulsed laser operation

PROCEEDINGS ARTICLE | February 22, 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Gold, Thin films, Optical lithography, Silica, Glasses, Interfaces, Nd:YAG lasers, Laser irradiation, Aluminum, Oxidation

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Optical circuits, Silica, Waveguides, Silicon, Light scattering, Semiconductor lasers, Infrared radiation, Photomasks, Charge-coupled devices, Pulsed laser operation

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Carbon, Etching, Spectroscopy, Silicon, Semiconductor lasers, Raman spectroscopy, Laser irradiation, Laser ablation, Gas lasers, Laser bonding

PROCEEDINGS ARTICLE | February 19, 2003
Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication
KEYWORDS: Thin films, Refractive index, Silica, Waveguides, Silicon, Semiconductor lasers, Silicon films, Helium neon lasers, Pulsed laser deposition, Thin film deposition

PROCEEDINGS ARTICLE | February 19, 2003
Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication
KEYWORDS: Thin films, Titanium dioxide, Crystals, Silicon, Surface roughness, Oxygen, Absorbance, Chlorine, Pulsed laser deposition, Thin film deposition

Showing 5 of 11 publications
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