Prof. Masayuki Okoshi
Professor at National Defense Academy
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 21 April 2017
Proc. SPIE. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
KEYWORDS: Thin films, Silica, Silicon, Coating, Carbon dioxide lasers, Semiconductor lasers, Laser irradiation, Silicon films, Profilometers, Thin film coatings

Proceedings Article | 22 February 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Silica, Glasses, Silicon, Laser applications, Resistance, Semiconductor lasers, Laser irradiation, Profilometers, Thin film coatings, Pulsed laser operation

Proceedings Article | 22 February 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Gold, Thin films, Optical lithography, Silica, Glasses, Interfaces, Nd:YAG lasers, Laser irradiation, Aluminum, Oxidation

Proceedings Article | 12 April 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Optical circuits, Silica, Waveguides, Silicon, Light scattering, Semiconductor lasers, Infrared radiation, Photomasks, Charge-coupled devices, Pulsed laser operation

Proceedings Article | 8 October 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Carbon, Etching, Spectroscopy, Silicon, Semiconductor lasers, Raman spectroscopy, Laser irradiation, Laser ablation, Gas lasers, Laser bonding

Showing 5 of 12 publications
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