Dr. Massimo Gagliardi
at Istituto per la Microelettronica e Microsistemi
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 20, 2007
Proc. SPIE. 6474, Zinc Oxide Materials and Devices II
KEYWORDS: Thin films, Refractive index, Waveguides, Etching, Glasses, Crystals, Silicon, Oxygen, Silicon films, Zinc oxide

PROCEEDINGS ARTICLE | April 28, 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Microelectromechanical systems, Microscopes, Holograms, Holography, 3D image reconstruction, Digital holography, Data modeling, Sensors, Silicon, Interferometry

PROCEEDINGS ARTICLE | March 7, 2005
Proc. SPIE. 5730, Optoelectronic Integration on Silicon II
KEYWORDS: Amorphous silicon, Carbon, Visible radiation, Modulation, Waveguides, Photons, Silicon, Doping, Infrared radiation, Absorption

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