Massimo D. Sardo
at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Atomic force microscopy, Carbon, Oxides, Transmission electron microscopy, Silicon, Logic, Image processing, Manufacturing, Statistical analysis, Semiconducting wafers

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