In this work the results of investigation of Cd<sub>1-x</sub>Mn<sub>x</sub>Te (x=0.01, 0.03, 0.05) solid solutions synthesis and their thin films' obtaining technology have been represented. Epitaxial films of monocrystalline Cd<sub>1-х</sub>Mn<sub>х</sub>Te semimagnetic semiconductors were obtained on mica substrate by MBC method. Lattice parameters and crystal structure of samples were defined with X-ray diffraction method. It has been studied the electrophysical parameters. Defect formation energy has been calculated for Cd<sub>1-х</sub>Mn<sub>х</sub>Te semimagnetic semiconductors by Ab-initio method using Atomistix Toolkit program. We have studied the dependence of defect formation energy on supercell size for charged vacancy and interstitial defects in Cd<sub>1-х</sub>MnхTe thin films.