Dr. Mathias P. Heckele
at Forschungszentrum Karlsruhe
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | May 9, 2018
Proc. SPIE. 10680, Optical Sensing and Detection V
KEYWORDS: Lithium, 3D modeling, Projection systems

SPIE Journal Paper | January 1, 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Polymers, Optimization (mathematics), Temperature metrology, Polymethylmethacrylate, Interfaces, Manufacturing, Glasses, Nanolithography, Nanostructures, Materials processing

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5345, Microfluidics, BioMEMS, and Medical Microsystems II
KEYWORDS: Microelectromechanical systems, Lithography, Microfluidics, Polymers, Metals, Spectroscopy, Silicon, Manufacturing, Micromachining, Semiconducting wafers

PROCEEDINGS ARTICLE | April 19, 2002
Proc. SPIE. 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
KEYWORDS: Gold, Microfluidics, Statistical analysis, Electrodes, Polymers, Metals, Capillaries, Molecules, Integration, Analytical research

PROCEEDINGS ARTICLE | April 5, 2001
Proc. SPIE. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
KEYWORDS: Diamond, Microfluidics, Statistical analysis, Polymethylmethacrylate, Polymers, Capillaries, Manufacturing, Micromachining, Standards development, Liquids

PROCEEDINGS ARTICLE | September 22, 1997
Proc. SPIE. 3135, Precision Plastic Optics for Optical Storage, Displays, Imaging, and Communications
KEYWORDS: Fabrication, Optical components, Waveguides, Polymers, Glasses, Spectrometers, Silicon, Manufacturing, Microlens, Standards development

Showing 5 of 7 publications
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