Dr. Mathias Krellmann
at Fraunhofer-IPMS
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Interferometers, In situ metrology, Error analysis, Interferometry, Spatial light modulators, Objectives, Microopto electromechanical systems, Micromirrors, Phase shifts

PROCEEDINGS ARTICLE | February 5, 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Mirrors, Microsystems, Calibration, Resistance, Microopto electromechanical systems, Micromirrors, Convection, Resistors, Temperature metrology, Photonic microstructures

PROCEEDINGS ARTICLE | January 6, 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Semiconductors, Lithography, Interferometers, Ultraviolet radiation, Materials processing, Laser ablation, Microopto electromechanical systems, Aluminum, Excimer lasers, Mirror structures

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4985, MOEMS Display and Imaging Systems
KEYWORDS: Oxides, Mirrors, Titanium, Deep ultraviolet, Electrodes, Ultraviolet radiation, Laser development, Oxygen, Spatial light modulators, Aluminum

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