Prof. Mathieu Luet
at ELDIM
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 20, 2004
Proc. SPIE. 5530, Fourth International Conference on Solid State Lighting
KEYWORDS: Optical filters, Light emitting diodes, Polarization, Sensors, Fourier transforms, Semiconductor lasers, Charge-coupled devices, Laser damage threshold, Fourier optics, CCD image sensors

PROCEEDINGS ARTICLE | September 10, 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Polarization, Scattering, Sensors, Air contamination, Light scattering, Polarizers, Optical testing, Printing, Bidirectional reflectance transmission function, Fourier optics

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Diffraction, Refractive index, Polarization, Reflection, Sensors, Silicon, Spectroscopic ellipsometry, Fourier optics, CCD image sensors, Diffraction gratings

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Diffraction, Sensors, Polarizers, Scanning electron microscopy, Photoresist materials, Spectroscopic ellipsometry, Specular reflections, Critical dimension metrology, CCD image sensors, Diffraction gratings

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