Prof. Mathieu Luet
at ELDIM
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 October 2004 Paper
Proc. SPIE. 5530, Fourth International Conference on Solid State Lighting
KEYWORDS: Optical filters, Light emitting diodes, Polarization, Sensors, Fourier transforms, Semiconductor lasers, Charge-coupled devices, Laser damage threshold, Fourier optics, CCD image sensors

Proceedings Article | 10 September 2004 Paper
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Polarization, Scattering, Sensors, Air contamination, Light scattering, Polarizers, Optical testing, Printing, Bidirectional reflectance transmission function, Fourier optics

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Diffraction, Refractive index, Polarization, Reflection, Sensors, Silicon, Spectroscopic ellipsometry, Fourier optics, CCD image sensors, Diffraction gratings

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Diffraction, Sensors, Polarizers, Scanning electron microscopy, Photoresist materials, Spectroscopic ellipsometry, Specular reflections, Critical dimension metrology, CCD image sensors, Diffraction gratings

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