Dr. Matthew Richter
at Innovative Process Solutions
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 August 1998
Proc. SPIE. 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
KEYWORDS: Semiconductors, FT-IR spectroscopy, Metrology, Sensors, Spectroscopy, Spectrometers, Dielectrics, Doping, Process control, Reflectance spectroscopy

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