Dr. Mattan Kamon Profile

Dr. Mattan Kamon

Distinguished Technologist, R&D

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Publications (3)

SPIE Journal Paper | 13 September 2016

Virtual fabrication using directed self-assembly for process optimization in a 14-nm dynamic random access memory

Mattan Kamon, Mustafa Akbulut, Yiguang Yan, Daniel Faken, Andras Pap, Vasanth Allampalli, Ken Greiner, David Fried

JM3, Vol. 15, Issue 03, 031605, (September 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.031605

KEYWORDS: Directed self assembly, Etching, Optical lithography, Process modeling, Capacitors, Device simulation, 3D modeling, Polymers, Virtual reality, Reactive ion etching

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Proceedings Article | 22 March 2016 Paper

Virtual fabrication using directed self-assembly for process optimization in a 14nm DRAM

Mattan Kamon, Mustafa Akbulut, Yiguang Yan, Daniel Faken, Andras Pap, Vasanth Allampalli, Ken Greiner, David Fried

Proceedings Volume 9777, 977710 (2016) https://doi.org/10.1117/12.2218935

KEYWORDS: Directed self assembly, Process modeling, Optical lithography, Capacitors, Lithography, Optimization (mathematics), Semiconductors, Software development, Interfaces, Transistors, Logic, Etching, Reactive ion etching, Device simulation, 3D modeling, Polymers, Virtual reality

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Proceedings Article | 7 March 2014 Paper

Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling

Sandipan Maity, Shuangqin Liu, Stephane Rouvillois, Gunar Lorenz, Mattan Kamon

Proceedings Volume 8977, 89770B (2014) https://doi.org/10.1117/12.2041067

KEYWORDS: Mirrors, 3D modeling, Finite element methods, Microelectromechanical systems, Statistical analysis, Semiconducting wafers, Mathematical modeling, Manufacturing, Device simulation, Simulink

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