Dr. Matteo Lorenzoni
at Institute of Microelectronics of Barcelona IMB-CNM
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | October 21, 2015
Proc. SPIE. 9636, Scanning Microscopies 2015
KEYWORDS: Metrology, Polymethylmethacrylate, Polymers, Microscopy, Silicon, Computer simulations, Atomic force microscopy, Microfabrication, Actinium, Amplitude modulation

SPIE Journal Paper | September 21, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Polymers, Electron beam lithography, Atomic force microscopy, Silicon, Photoresist processing, Deep ultraviolet, Annealing, Polymethylmethacrylate, Electrons, Directed self assembly

SPIE Journal Paper | September 11, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Polymethylmethacrylate, Polymers, Atomic force microscopy, Polymer thin films, Thin films, Dewetting, Silicon, Plasma, Manganese, Spatial resolution

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Deep ultraviolet, Polymers, Electrons, Silicon, Atomic force microscopy, Directed self assembly, Photoresist processing, Molecular self-assembly

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Polymethylmethacrylate, Polymers, Dewetting, Silicon, Atomic force microscopy, Erbium, Picosecond phenomena, Manganese, Polymer thin films

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top