Matthew T. Cook
at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 September 2019
Proc. SPIE. 11118, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXI
KEYWORDS: Lithography, Sensors, Metals, Particles, X-rays, Germanium, Silicon, Charge-coupled devices, Semiconducting wafers, X-ray detectors

Proceedings Article | 6 July 2018
Proc. SPIE. 10709, High Energy, Optical, and Infrared Detectors for Astronomy VIII
KEYWORDS: X-rays, Germanium, Charge-coupled devices, X-ray detectors

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Electron beam lithography, Etching, Silicon, Resistance, Photoresist materials, Maskless lithography, Microfabrication, Critical dimension metrology, Photoresist processing, Semiconducting wafers

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