Dr. Matthew D. Coventry
at Starfire Industries LLC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Optical components, Lithography, Mirrors, Reticles, Electrodes, Photodiodes, Xenon, Extreme ultraviolet, Plasma, Light

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Crystals, Ions, Silicon, Atomic force microscopy, Xenon, Palladium, Extreme ultraviolet lithography, Molybdenum, Ruthenium

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