Matthew Kinzler
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 October 2019 Presentation
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Signal attenuation, Silicon, Inspection, Photonics, Photomasks, Optical proximity correction, Mask making, Silicon photonics, Semiconducting wafers, Data corrections

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