Progress towards semiconductor laser frequency stabilization using optical feedback from microtoroidal resonators
is presented. A simple model of the feedback mechanism is provided, and equations of motion describing the
system fields are given. Reactive ion etcher based fabrication of microtoroidal resonators with intrinsic quality
factors as high as 1.6 x 10<sup>5</sup> is demonstrated. This fabrication technique enables improved silicon surface quality
and greater control of the physical structure of the microresonators.