Mr. Matthew McQuillan
at Naval Surface Warfare Ctr Dahlgren Div
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 16, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Etching, Image processing, Manufacturing, Scanning electron microscopy, Image quality, Process control, Optical alignment, Critical dimension metrology, Iterated function systems

PROCEEDINGS ARTICLE | March 20, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Diffraction, Reticles, Metrology, Calibration, Quartz, Scanners, Semiconducting wafers, Overlay metrology, Phase shifts, Diffraction gratings

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Monochromatic aberrations, Reticles, Metrology, Data modeling, Calibration, Matrices, Scanners, Image analysis, Photoresist materials, Semiconducting wafers

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