Mr. Matthew A. Purdy Profile

Matthew A. Purdy

at Advanced Micro Devices Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 1 July 2003 Paper

Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

Timothy Stanley, Richard Markle, Matthew Purdy, Brad Van Eck, Brian Cusson, K. Stanley

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485316

KEYWORDS: Semiconducting wafers, Chemical mechanical planarization, Process control, Manufacturing, Semiconductors, Semiconductor manufacturing, Diffusion, Metrology, Copper, Logic

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Proceedings Article | 1 July 2003 Paper

Recursive least squares estimation and its application to shallow trench isolation

Matthew Purdy, S. Joe Qin, Christopher Bode, Jin Wang

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485293

KEYWORDS: Etching, Process control, Metrology, Error analysis, Time metrology, Digital filtering, Semiconductor manufacturing, Process modeling, Control systems, Statistical analysis

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Proceedings Article | 22 August 2001 Paper

Scatterometry for shallow trench isolation (STI) process metrology

Richard Markle, Christopher Raymond, Matthew Purdy, Michael Littau

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436798

KEYWORDS: Semiconducting wafers, Etching, Scatterometry, Scanning electron microscopy, Scatter measurement, Silicon, Atomic force microscopy, Metrology, Light scattering, Diffraction

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Conference Committee Involvement (1)

Advanced Process Control and Automation

27 February 2003 | Santa Clara, CA, United States

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