Dr. Matthew H. Seaberg
at SLAC National Accelerator Lab
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 25 August 2020 Presentation
Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV
KEYWORDS: Cooling systems, Mirrors, Metrology, Mechanics, X-rays, Interferometry, Wavefronts, Space mirrors, Grazing incidence, Liquid crystal lasers

Proceedings Article | 24 April 2019 Presentation + Paper
Proc. SPIE. 11038, X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation V
KEYWORDS: Optical microscopes, Monochromatic aberrations, Mirrors, Sensors, Calibration, X-rays, Interferometry, Scanning electron microscopy, X-ray imaging

Proceedings Article | 24 April 2019 Presentation + Paper
Proc. SPIE. 11038, X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation V
KEYWORDS: X-rays, Electrons, Diagnostics, Dynamic light scattering, Neural networks, Spatial coherence, X-ray lasers, X-ray imaging, Free electron lasers, Stochastic processes

Proceedings Article | 18 September 2018 Presentation + Paper
Proc. SPIE. 10761, Adaptive X-Ray Optics V
KEYWORDS: Mirrors, Light sources, X-ray optics, Lenses, X-rays, Wavefront aberrations, Adaptive optics, Wavefront analysis, Wavefront distortions, Wavefront metrology

Proceedings Article | 21 April 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Diffraction, Coherence imaging, Microscopy, Photons, X-rays, Silicon, Reflectivity, Multiplexing, Phase imaging, Process control, Extreme ultraviolet, Coherent x-ray sources, Defect inspection

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top