Matthew Tedaldi
Application Engineer at Infinitesima Ltd
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Diamond, Metrology, Switching, Microscopy, Gallium arsenide, Transmission electron microscopy, Tomography, 3D metrology, Semiconductor manufacturing, 3D equipment

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Microscopes, Metrology, Manufacturing, Image quality, 3D metrology, Photomasks, Line edge roughness, Structural design, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 27 May 2011 Paper
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Diffraction, Dispersion, Optical coherence tomography, Polymers, Particles, Diffusion, Wavefronts, Linear filtering, Dynamic light scattering, Nanocomposites

Proceedings Article | 20 February 2009 Paper
Proc. SPIE. 7171, Multimodal Biomedical Imaging IV
KEYWORDS: Refractive index, Coherence (optics), Silica, Optical coherence tomography, Interfaces, Interferometry, Radon transform, Geometrical optics, Laser beam diagnostics, Refractometry

Proceedings Article | 18 February 2008 Paper
Proc. SPIE. 6847, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine XII
KEYWORDS: Point spread functions, 3D acquisition, Optical spheres, Imaging systems, Calibration, Optical coherence tomography, Particles, Image resolution, Spectral resolution, 3D image processing

Showing 5 of 7 publications
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