Dr. Matthias Müller Profile

Dr. Matthias Müller

at Laser-Lab Göttingen eV

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 16 May 2019 Paper

K. Mann, J. Holburg, S. Lange, M. Müller, B. Schäfer

Proceedings Volume 10957, 109571H (2019) https://doi.org/10.1117/12.2515215

KEYWORDS: Plasmas, Extreme ultraviolet, Xenon, Nitrogen, Metrology, Mirrors, Polymethylmethacrylate, Particles, Krypton, Gas lasers

Proceedings Article | 3 May 2013 Paper

Matthias Müller, Frank Barkusky, Torsten Feigl, Klaus Mann

Proceedings Volume 8777, 877705 (2013) https://doi.org/10.1117/12.2016980

KEYWORDS: Extreme ultraviolet, Mirrors, Laser damage threshold, Wavefronts, Beam splitters, Reflectivity, Silicon, Multilayers, Reflection, Plasma

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Keywords/Phrases