Matthias Schumann
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 September 2019
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Reflectors, Mirrors, Metrology, Interferometers, Sensors, Calibration, Interferometry, Autocollimators

Proceedings Article | 9 September 2019
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, Beam splitters, Reticles, Metrology, Calibration, CCD cameras, Autocollimators, Distance measurement, Objectives, Charge-coupled devices

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