Matthias Voigt
President at SensorDesk Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 October 2007 Paper
Proc. SPIE. 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V
KEYWORDS: Cameras, Lamps, Calibration, Sensors, Reflectivity, Image storage, Image classification, Image sensors, Edge detection, RGB color model

Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6541, Thermosense XXIX
KEYWORDS: Error analysis, Temperature metrology, Reflectivity, Reflection, Sensors, Environmental sensing, Staring arrays, Signal attenuation, Roentgenium, Infrared radiation

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5784, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XVI
KEYWORDS: Nonuniformity corrections, Sensors, Amplifiers, Statistical analysis, Systems modeling, Staring arrays, Error analysis, Neodymium, Image sensors, Motion models

Proceedings Article | 10 May 2005 Paper
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Semiconducting wafers, Scatterometry, Scatter measurement, Silicon, System integration, Process control, Scanning electron microscopy, Critical dimension metrology, Metrology, Inspection

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