Matthias Voigt
President at SensorDesk Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 October 2007
Proc. SPIE. 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V
KEYWORDS: Edge detection, Cameras, Sensors, Calibration, Lamps, Reflectivity, Image sensors, Image classification, Image storage, RGB color model

Proceedings Article | 12 April 2007
Proc. SPIE. 6541, Thermosense XXIX
KEYWORDS: Staring arrays, Roentgenium, Reflection, Sensors, Signal attenuation, Error analysis, Reflectivity, Infrared radiation, Environmental sensing, Temperature metrology

Proceedings Article | 12 May 2005
Proc. SPIE. 5784, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XVI
KEYWORDS: Staring arrays, Nonuniformity corrections, Statistical analysis, Sensors, Error analysis, Amplifiers, Image sensors, Neodymium, Motion models, Systems modeling

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Metrology, Silicon, Inspection, Scanning electron microscopy, Scatterometry, Process control, Critical dimension metrology, System integration, Semiconducting wafers, Scatter measurement

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