Matthias Wissen
at Bergische Univ Wuppertal
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 2 May 2008
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Lithography, Sensors, Electrodes, Ultraviolet radiation, Silicon, Coating, Photoresist materials, Photomasks, Nanoimprint lithography, Temperature metrology

Proceedings Article | 3 May 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Lithography, Optical lithography, Polymers, Capillaries, Silicon, Inspection, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Photomicroscopy

Proceedings Article | 16 June 2005
Proc. SPIE. 5835, 21st European Mask and Lithography Conference
KEYWORDS: Microelectromechanical systems, Lithography, Optical lithography, Sensors, Etching, Dry etching, Polymers, Photomasks, Nanoimprint lithography, Reactive ion etching

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Polymers, Ultraviolet radiation, Silicon, Coating, Nanoimprint lithography, Optical alignment, Fluorine, Photoresist processing, Semiconducting wafers

Proceedings Article | 2 June 2004
Proc. SPIE. 5504, 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Lithography, Etching, Polymers, Glasses, Silicon, Oxygen, Photomasks, Picosecond phenomena, Nanoimprint lithography, Reactive ion etching

Showing 5 of 10 publications
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