Dr. Matthieu Ja Denoual
at ST Microelectronis
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Electrodes, Silicon, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Deposition processes, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | April 18, 2003
Proc. SPIE. 5119, Bioengineered and Bioinspired Systems
KEYWORDS: Microscopes, Microfluidics, Stars, Silicon, Photoresist materials, Telecommunications, Biological research, Semiconducting wafers, Prototyping, Liquids

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