This paper reports a new method of amorphous layer deposition thanks traditional PECVD insulators equipments for seed layer performing. The main application of this method is the realisation of seed layer for EPIPOLY process without using LPCVD furnace. Amorphous layers are obtained thanks to traditional PECVD insulators equipment, AMT 5000, which allows to prevent LPCVD furnace from cross contamination. Furthermore AMT 5000 as single wafer equipment fits much better in ato research using. The major interest of the method is its compatibility with traditional microelectronic process and it involves very common PECVD equipment.
The basic advantage of the microfluidic systems is that they enable reducing consumption of biological material and chemicals. But another major advantage of the microfluidic systems, not widely explored so far, is that with feature sizes reduced toward the size of cells, one can easily handle and fix a single cell. The interest of single cell handling and fixing appears when one wants to study biochemical exchanges between single cells or internal biochemical reactions inside an isolated cell. This work uses the shape of the microfluidc device to control the migration and placement of single vegetal cells. Three-dimensional micro-molding and poly-dimethylsiloxane (PDMS) patterning techniques have been used to realize device prototypes. Double-height micro-molds are made of thick negative photoresist (SU8) Experiments have been undergone to optimize fluid rate flow and cell concentration regarding to right cell placement percentage. The PDMS prototypes systems confirm the good operation of the design to migrate cells, place and fix them. The placement rate, even if it is enough for statistical biochemical experiments, will be improved by the use of new material. New material will allow to get rid of air bubbles due to PDMS long-term hydrophobicity that render up to 25% settlement places unserviceable.