Matus Banyay
at Sirona Dental Systems GmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 18, 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Extreme ultraviolet, Reflectivity, Carbon, Silicon, Reflectometry, Sensors, Absorption, Metrology, Plasmas, Mirrors

PROCEEDINGS ARTICLE | September 3, 2008
Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III
KEYWORDS: Extreme ultraviolet, Light sources, Reflectivity, Charge-coupled devices, Thin films, Surface roughness, X-ray optics, Alternate lighting of surfaces, Silicon, Scatterometry

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