Matus Banyay
at Sirona Dental Systems GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Carbon, Mirrors, Metrology, Sensors, Silicon, Plasmas, Reflectivity, Reflectometry, Extreme ultraviolet, Absorption

Proceedings Article | 3 September 2008
Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III
KEYWORDS: Thin films, Light sources, X-ray optics, Silicon, Reflectivity, Surface roughness, Scatterometry, Extreme ultraviolet, Charge-coupled devices, Alternate lighting of surfaces

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