Dr. Maurizio Tormen
Project Manager at Ctr Suisse d'Electronique et de Microtechnique SA
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10567, International Conference on Space Optics — ICSO 2006
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Optical design, Tunable lasers, Etching, Silicon, Photomasks, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10566, International Conference on Space Optics — ICSO 2008
KEYWORDS: Microelectromechanical systems, Mid-IR, Optical filters, Spectroscopy, Infrared spectroscopy, Infrared radiation, Chemical analysis, Connectors, Monochromators, Diffraction gratings

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Waveguides, Sensors, Etching, Silicon, Temperature sensors, Microopto electromechanical systems, Electromagnetism

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Cameras, Electrodes, Silicon, Micromirrors, Microfabrication, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Optical filters, Light sources, Electronics, Fiber Bragg gratings, Quantum cascade lasers, Collimators, Tunable filters, Monochromators, Diffraction gratings

PROCEEDINGS ARTICLE | February 11, 2011
Proc. SPIE. 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
KEYWORDS: Microelectromechanical systems, Actuators, Doppler effect, Reliability, Laser Doppler velocimetry, Relays, Analytical research, Velocity measurements, Failure analysis, Instrument modeling

Showing 5 of 7 publications
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